Murata’s accelerometers, inclinometers and gyroscopes are based on the company's proprietary 3D MEMS technology, and they offer a number of excellent product features and benefits for the most demanding applications. The sensors are environmentally protected with silicone gel, resulting in excellent performance and reliability in a humid environment and at temperature cycling. In addition, the robust sensing element design with over damped frequency response enables excellent performance even in harsh and vibrating environments.
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Brochure
Murata 3D MEMS sensors
Find out more about Murata's 3D MEMS sensor technology based on the toolset and processes for manufacturing semiconductor devices.
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